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Atomic Layer Deposition Applications 15 (PDF) – 236th ECS Meeting

Atomic Layer Deposition Applications 15 (PDF) – 236th ECS Meeting

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This issue of ECS Transactions includes papers based on presentations from the symposium "Atomic Layer Deposition Applications 15," originally held at the 236th ECS Meeting in Atlanta, Georgia, October 13-17, 2019.
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$69.21 - Atomic Layer Deposition Applications 15 (PDF) – 236th ECS Meeting

ISBN:978-1-60768-877-8
Year published:2019
Authors/Editors:F. Roozeboom, S. De Gendt, J. Dendooven, J. Elam, O. van der Straten, C. Liu, G. Sundaram, A. Illiberi
Event Title:236th ECS Meeting: Atlanta, GA
Format:PDF
Product Code:T201909203PDF
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Description
This issue of ECS Transactions includes papers based on presentations from the symposium "Atomic Layer Deposition Applications 15," originally held at the 236th ECS Meeting in Atlanta, Georgia, October 13-17, 2019.
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