This issue of ECS Transactions includes papers based on presentations from the symposium "Semiconductor Process Integration 11," originally held at the 236th ECS Meeting in Atlanta, Georgia,more»
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This issue of ECS Transactions includes papers based on presentations from the symposium "Atomic Layer Deposition Applications 15," originally held at the 236th ECS Meeting in Atlanta, Georgmore»
Authors/Editors:F. Roozeboom, S. De Gendt, J. Dendooven, J. Elam, O. van der Straten, C. Liu, G. Sundaram, A. IlliberiProduct Code:T201909203PDF
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This issue of ECS Transactions includes papers based on presentations from the symposium "16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)," originallymore»
Authors/Editors:K. Saga, P. W. Mertens, T. Hattori, J. Ruzyllo, A. J. MuscatProduct Code:T201909202PDF
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This issue of ECS Transactions includes papers based on presentations from the symposium "Semiconductors, Dielectrics, and Metals for Nanoelectronics 17," originally held at the 236th ECS Memore»
Authors/Editors:D. Misra, S. De Gendt, S. Kilgore, K. Kita, S. Dayeh, K. KakushimaProduct Code:T201909201PDF
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