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(Print on Demand) 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)

(Print on Demand) 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)

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$83.20 - (Print on Demand) 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)

ISBN:978-1-51089-588-1
Number of pages:274
Year published:2019
Authors/Editors:K. Saga, P. W. Mertens, T. Hattori, J. Ruzyllo, A. J. Muscat
Event Title:236th ECS Meeting: Atlanta, GA
Format:Softcover
Product Code:T201909202POD
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