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This issue of ECS Transactions continues the series of symposia that focus on all aspects of research and development in the field of chemical and biological sensors, including molecular recognition surfaces, transduction methods, integrated and microsensor systems. Particular emphasis was placed on processes and potential applications of these devices. It also continues the series of symposia that focus on all aspects of MEMS/NEMS technology including micro/nanomachining, fabrication processes, packaging, and the application of these structures and processes to the miniaturization of chemical sensors, physical sensors, biosensors, miniature chemical analysis systems and other devices.