Online Store

These Proceedings of the 12th High Purity Silicon symposium provides an overview of the latest developments in growth, characterization, device processing and applications of high purity silicon and related Group IV semiconductors (Ge, SiGe,...) in either bulk or epitaxial form. The emphasis is on the control and prevention of impurity incorporation, characterization and detection of defects and impurity states in high purity and high resistivity silicon for superior device performance and processing yield. Device and circuit aspects related to the application of the devices fabricated on high resistivity silicon wafers will also be addressed. Special attention will be given to alternative and high-mobility substrates and their material and devices aspects in comparison with silicon.