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Semiconductor Cleaning Science and Technology 14 (SCST 14) – 228th ECS Meeting

Semiconductor Cleaning Science and Technology 14 (SCST 14) – 228th ECS Meeting

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Quick Overview:
This issue of ECS Transactions will be focused on topics relevant to their symposium. The papers included in this issue of ECST were originally presented during the 228th meeting of The Electrochemical Society, in Phoenix, AZ, from October 11 to October 16, 2015.

CD/USB Edition: $129.00 list price

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$129.00 - Semiconductor Cleaning Science and Technology 14 (SCST 14)

$103.00 - Semiconductor Cleaning Science and Technology 14 (SCST 14)

ISBN:978-1-62332-315-8
Number of pages:403
Year published:2015
Authors/Editors:Ruzyllo, Hattori, Mertens, and Novak
Event Title:228th ECS Meeting: Phoenix, Arizona
Format:CD
Product Code:T201506908CD
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