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Silicon-on-Insulator Technology and Devices

Silicon-on-Insulator Technology and Devices

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Quick Overview:
Following two papers giving an overview, sessions were held on: manufacturing of SOI materials, SIMOX material formation and structural evaluation, nondestructive SOI layer measurement, bonded wafer material formation and structural evaluation, SOI material evaluation techniques, novel SOI technologies, and SOI device performance-discrete and IC.
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ISBN:n/a
Number of pages:563
Year published:1990
Authors/Editors:D. N. Schmidt
Event Title:177th ECS Meeting: Montreal, Canada
Format:Softcover
Product Code:PV199006
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Description
Following two papers giving an overview, sessions were held on: manufacturing of SOI materials, SIMOX material formation and structural evaluation, nondestructive SOI layer measurement, bonded wafer material formation and structural evaluation, SOI material evaluation techniques, novel SOI technologies, and SOI device performance-discrete and IC.
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