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Atomic Layer Deposition Applications 5 – 216th ECS Meeting

Atomic Layer Deposition Applications 5 – 216th ECS Meeting

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Quick Overview:
Atomic Layer Deposition can enable precise deposition of ultra-thin, highly conformal coatings over complex 3D topography, with controlled composition and properties for a wide range of applications.

$91.31 - Atomic Layer Deposition Applications 5

$73.05 - Atomic Layer Deposition Applications 5

Number of pages:411
Year published:2009
Authors/Editors:De Gendt, Bent, Delabie, Elam, Kang, van der Straten, and Londergan
Event Title:216th ECS Meeting: EuroCVD 17 & SOFC-XI: Vienna, Austria
Product Code:T200902504
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