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Semiconductor Cleaning Science and Technology 12 – 220th ECS Meeting

Semiconductor Cleaning Science and Technology 12 – 220th ECS Meeting

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Quick Overview:
This issue of ECS Transactions includes a collection of state-of-the-art papers on science and technology of semiconductor cleaning and surface conditioning for device manufacturing.
Price:

$113.25 - Semiconductor Cleaning Science and Technology 12

$90.60 - Semiconductor Cleaning Science and Technology 12

ISBN:978-1-60768-259-2
Number of pages:413
Year published:2011
Authors/Editors:Hattori, Ruzyllo, Mertens, and Novak
Event Title:220th ECS Meeting: Boston, MA
Format:PDF
Product Code:T201104105
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