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Chemical Mechanical Polishing 11 – 218th ECS Meeting

Chemical Mechanical Polishing 11 – 218th ECS Meeting

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Quick Overview:
The papers included in this issue of ECS Transactions were originally presented in the symposium “Chemical Mechanical Polishing 11”, held during the 218th meeting of The Electrochemical Society, in Las Vegas, Nevada from October 10 to 15, 2010.

$57.93 - Chemical Mechanical Polishing 11

Number of pages:190
Year published:2010
Authors/Editors:Banerjee, Desai, Obeng, Sundaram
Event Title:218th ECS Meeting: Las Vegas, NV
Product Code:T201003310
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