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The 2011 CSTIC conference offered more than 390 high quality presentations and posters in ten symposia to cover most of the aspects of semiconductor and solar technology, of which 179 are collected in this issue of ECS Transactions. It is well known that the silicon technology development trend is primarily dependent of innovative materials application. In this issue, there are more than 50% presentations on new material and process related technologies, while the rest are related to device and process integration.