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Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11 – 216th ECS Meeting

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11 – 216th ECS Meeting

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Quick Overview:
This issue of ECS Transactions includes papers presented during the 11th International Symposium on Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing held during the ECS Fall Meeting in Vienna, Austria, October 4-9, 2009.
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$104.95 - Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11

$83.96 - Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11

ISBN:978-1-60768-092-5
Number of pages:393
Year published:2009
Authors/Editors:Hattori, Ruzyllo, Novak, Mertens, and Besson
Event Title:216th ECS Meeting: EuroCVD 17 & SOFC-XI: Vienna, Austria
Format:PDF
Product Code:T200902505
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