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Atomic Layer Deposition Applications 10 – 226th ECS Meeting

Atomic Layer Deposition Applications 10 – 226th ECS Meeting

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Quick Overview:
This issue of ECS Transactions describes emerging materials, process and technology options using Atomic Layer Deposition. Applications encompass a wide variety of materials, to enable improved or device structures with entirely new functionalities in electronics, photovoltaics, thermoelectrics, etc.Topics include: high-permittivity, oxidic and conductive materials for information and energy storage, reaction mechanisms, molecular layer deposition new precursors and process equipment improvement.

$119.00 - Atomic Layer Deposition Applications 10

$96.00 - Atomic Layer Deposition Applications 10

Year published:2014
Authors/Editors:Roozeboom, De Gendt, Delabie, Elam, van der Straten, Londergan
Event Title:226th ECS Meeting: 2014 ECS and SMEQ Joint International Meeting: Cancun, Mexico
Product Code:T201406409HC
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