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Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment – 213th ECS Meeting

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment – 213th ECS Meeting

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$104.00 - Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment

$83.20 - Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment

Number of pages:474
Year published:2008
Authors/Editors:P. J. Timans, E. P. Gusev, H. Iwai, D. L. Kwong, M. C. Öztürk, F. Roozeboom
Event Title:213th ECS Meeting: Phoenix, Arizona
Format:PDF
Product Code:T200801301
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