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This issue of ECS Transactions includes 33 papers presented at the Fourth International Conference on Semiconductor Technology for Ultra Large Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT 4), held at the Villard-de-Lans (Grenoble area), France July 7-12, 2013. Following the tradition of the last three conferences, this is a forum for open discussion on the latest progress of the two largest semiconductor technologies - ULSIC and TFT. Global experts from universities, companies, and national laboratories exchanged experience, knowledge, and visions through technical presentations and discussions. Scientific and technology challenges were predicted and debated. Graduate students and junior researchers from various countries also presented papers as well as engaged in discussions. Participants and authors were from Belgium, Canada, France, Germany, India, Italy, Japan, Korea, Netherlands, Norway, Spain, UK, and the USA.