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Atomic Layer Deposition Applications 9 – 224th ECS Meeting

Atomic Layer Deposition Applications 9 – 224th ECS Meeting

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Quick Overview:
These proceedings describe emerging materials, process and technology options using Atomic Layer Deposition. Applications encompass a wide variety of materials, to enable improved or device structures with entirely new functionalities in electronics, photovoltaics, thermoelectrics. Topics include : high-permittivity, oxidic and conductive materials for information and energy storage, reaction mechanisms, molecular layer deposition new precursors and process equipment improvement.

$104.61 - Atomic Layer Deposition Applications 9

$83.69 - Atomic Layer Deposition Applications 9

Number of pages:337
Year published:2013
Authors/Editors:Roozeboom, De Gendt, Delabie, Elam, Londergan, Van Der Straten
Event Title:224th ECS Meeting: San Francisco, California
Product Code:T201305810
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